TCAD study of the Holding-Voltage Modulation in Irradiated SCR-LDMOS for HV ESD Protection

Laura Zunarelli, L. Balestra, S. Reggiani, R. Sankaralingam, M. Dissegna, G. Boselli
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Abstract

This paper investigates a method to increase the holding voltage in a conventional Silicon Controlled Rectifier (SCR) for ESD power clamping. Specifically, a SCR-LDMOS device with 150 V trigger voltage and 9 V holding voltage is investigated assuming the application of high-energy electron irradiation. Based on previous experimental and TCAD investigations, the most relevant kind of defects is accounted for at different irradiation levels clearly showing an increase of the holding voltage up to 16 V without any other significant change in the TLP characteristics. The role of trapped charges in the holding regime has been addressed up to the thermal runaway through extensive numerical investigations.
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辐照SCR-LDMOS保压调制的TCAD研究
本文研究了一种提高传统可控硅(SCR)保持电压的方法,用于ESD电源箝位。具体来说,研究了一种触发电压为150 V、保持电压为9 V的SCR-LDMOS器件。根据之前的实验和TCAD研究,在不同的辐照水平下,最相关的缺陷类型清楚地表明,保持电压增加到16 V,而TLP特性没有任何其他显着变化。通过广泛的数值研究,捕获电荷在保温状态下的作用一直到热失控。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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