H. P. Tuinhout, G. Hoogzaad, M. Vertregt, R. Roovers, C. Erdmann
{"title":"Design and characterisation of a high precision resistor ladder test structure","authors":"H. P. Tuinhout, G. Hoogzaad, M. Vertregt, R. Roovers, C. Erdmann","doi":"10.1109/ICMTS.2002.1193200","DOIUrl":null,"url":null,"abstract":"A new sub-site stepped multi-resistor test structure for characterising small resistance mismatch effects in resistor ladders is introduced. Using a Kelvin measurement method and a statistical data evaluation technique, this approach enables identification of very small (<0.05%) systematic mismatch patterns, which are associated with local mechanical stress as well as nanometre scale mask writing artifacts.","PeriodicalId":188074,"journal":{"name":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","volume":"29 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2002.1193200","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 20
Abstract
A new sub-site stepped multi-resistor test structure for characterising small resistance mismatch effects in resistor ladders is introduced. Using a Kelvin measurement method and a statistical data evaluation technique, this approach enables identification of very small (<0.05%) systematic mismatch patterns, which are associated with local mechanical stress as well as nanometre scale mask writing artifacts.
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