Integrated microheaters for in-situ flying-height control of sliders used in hard-disk drives

P. Machtle, R. Berger, A. Dietzel, M. Despont, W. Haberle, R. Stutz, G. Binnig, P. Vettiger
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引用次数: 30

Abstract

Air-bearing sliders in today's hard-disk drives are flying above the spinning magnetic disks at a very low distance. With continuously increasing recording density this distance reduces and will fall below ten nanometers in the near future. This paper discusses the use of thin-film microheaters integrated into the air-bearing surface of such sliders for in-situ flying-height control. The microheaters can be realized with only a few fabrication steps that can be added to the standard slider manufacturing process. The microheaters transfer thermal energy into the sliders leading to nonuniform deformation, of the air-bearing surfaces. As a consequence the balance between the air cushion lift forces and the load forces is shifted and the flying height is varied. A transfer of thermal energy into the air cushion is also discussed. A comparison of experiments and simulations reveals that microheater-induced changes in the waviness of the air-bearing surface are responsible for flying-height actuation with both polarities. Based on this finding actuation schemes with improved efficiency are discussed that offer the possibility of compensating manufacturing tolerances and also of improving the reliability of future hard-disk drives.
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用于硬盘驱动器滑块原位飞行高度控制的集成微加热器
今天的硬盘驱动器中的空气轴承滑块以非常低的距离在旋转的磁盘上方飞行。随着记录密度的不断增加,这个距离会减小,在不久的将来会降到10纳米以下。本文讨论了将薄膜微加热器集成到此类滑块的气轴承表面以实现原位飞行高度控制。微加热器可以实现只有几个制造步骤,可以添加到标准滑块制造过程。微加热器将热能传递到滑块中,导致空气轴承表面的不均匀变形。因此,气垫升力和负载力之间的平衡发生了变化,飞行高度也发生了变化。还讨论了将热能传递到气垫中的问题。实验与仿真对比表明,微加热器引起的空气轴承表面波浪形的变化是导致两极性飞行高度驱动的原因。基于这一发现,讨论了提高效率的驱动方案,为补偿制造公差和提高未来硬盘驱动器的可靠性提供了可能性。
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