{"title":"A test structure for the design of thermal flow sensors","authors":"N. Sabaté, I. Gràcia, J. Santander, C. Cané","doi":"10.1109/ICMTS.2002.1193180","DOIUrl":null,"url":null,"abstract":"A test structure for the design and optimisation of thermal gas flow sensors has been developed. This test structure provides information about the temperature distribution created around a heating element as well as its modification due to a gas flow, thus permitting to obtain information about the thermal conductivity of the membrane material. Data obtained from the characterisation of the structure can be used in the optimisation of a flow sensor designed for any specific application.","PeriodicalId":188074,"journal":{"name":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-04-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2002.1193180","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8
Abstract
A test structure for the design and optimisation of thermal gas flow sensors has been developed. This test structure provides information about the temperature distribution created around a heating element as well as its modification due to a gas flow, thus permitting to obtain information about the thermal conductivity of the membrane material. Data obtained from the characterisation of the structure can be used in the optimisation of a flow sensor designed for any specific application.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
