X. Federspiel, A. Griffon, Marios Barlas, P. Lamontagne
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Abstract
Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.
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