Selective growth of carbon nanotubes for nano electro mechanical device

Abstract

In this paper, we present the growth techniques of carbon nanotubes and its application for nano-electromechanical devices. Several methods were attempted for the selective growth of the carbon nanotubes. Catalyzed metal (Ni) patterning and the following hot-filament chemical vapor deposition enable to grow carbon nanotubes on the metal pattern formed on quartz glass. However, no carbon nanotubes are grown on a flat silicon substrate using this method. It is found that the high electrostatic field with a negative substrate bias enhances the growth of the carbon nanotubes. This growth enhancement effect is applied to fabricate single carbon nanotube tip on silicon for scanning probe microscopy.