Effective first layer antireflective coating on InP solar cells grown by chemical oxidation

M. Faur, M. Faur, D. Flood, D. Brinker, C. Goradia, S. Bailey, I. Weinberg, M. Goradia, D. Jayne, J. Moulot, N. Fatemi
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引用次数: 5

Abstract

Commonly used first layer antireflection (AR) coatings for InP solar cells, such as ZnS, Sb/sub 2/O/sub 3/, SiO/sub 2/ and SiO, deposited either by electron-beam or by resistive evaporation, destroy the stoichiometry of the emitter surface. Consequently, the surface recombination velocity (SRV) at the emitter surface is significantly increased, leading to a reduction in the values of solar cell performance parameters. This can be prevented by growing, after contacting, a thin native oxide layer on the emitter surface. Best results are obtained using a phosphorus-rich chemical oxide grown by chemical oxidation using a newly developed etchant (PNP) based on HNO/sub 3/, o-H/sub 3/PO/sub 4/ and H/sub 2/O/sub 2/. The chemical oxide grown on p/sup +/-InP emitters, using the PNP etchant, passivates the surface and can be used as a first layer AR coating.<>
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化学氧化法制备InP太阳能电池的有效第一层抗反射涂层
通常用于InP太阳能电池的第一层增透(AR)涂层,如ZnS、Sb/sub 2/O/sub 3/、SiO/sub 2/和SiO,通过电子束或电阻蒸发沉积,破坏了发射极表面的化学计量。因此,发射极表面的表面复合速度(SRV)显著增加,导致太阳能电池性能参数值降低。这可以通过在接触后在发射极表面生长薄的天然氧化层来防止。采用基于HNO/sub 3/、O -H/sub 3/PO/sub 4/和H/sub 2/O/sub 2/的新型蚀刻剂(PNP)进行化学氧化,获得了最佳的富磷化学氧化物。化学氧化物生长在p/sup +/-InP发射器上,使用PNP腐蚀剂,使表面钝化,可用作第一层AR涂层。
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Comparisons between conventional LEC, VCZ and VGF for the growth of InP crystals Reliability of InP-based HBT's and HEMT's: experiments, failure mechanisms, and statistics Bulk InP technologies: InP against GaAs Improvement of InAlAs/InP heterointerface grown by MOVPE by using thin AlP layer Low pressure pyrolysis of alternative phosphorous precursors for chemical beam epitaxial growth of InP and related compounds
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