{"title":"High-Q Micromachined Silver Passives and Filters","authors":"M. Rais-Zadeh, P. Kohl, F. Ayazi","doi":"10.1109/IEDM.2006.346889","DOIUrl":null,"url":null,"abstract":"This paper presents high aspect-ratio silver (Ag) micromachining for implementation of very high quality factor (Q) tunable, and fixed passives, and low insertion loss bandpass LC filters. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss (IL) at radio frequencies","PeriodicalId":366359,"journal":{"name":"2006 International Electron Devices Meeting","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2006.346889","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 21
Abstract
This paper presents high aspect-ratio silver (Ag) micromachining for implementation of very high quality factor (Q) tunable, and fixed passives, and low insertion loss bandpass LC filters. A combination of low-loss substrate and highest conductivity metal is used to achieve record high Q and low insertion loss (IL) at radio frequencies
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