K. Yeo, S. Suk, Ming Li, Y. Yeoh, K. Cho, Ki-Ha Hong, Seon-Pil Yun, Mong Sup Lee, N. Cho, Kwan-heum Lee, D. Hwang, Bokkyoung Park, Dong-Won Kim, Donggun Park, B. Ryu
{"title":"Gate-All-Around (GAA) Twin Silicon Nanowire MOSFET (TSNWFET) with 15 nm Length Gate and 4 nm Radius Nanowires","authors":"K. Yeo, S. Suk, Ming Li, Y. Yeoh, K. Cho, Ki-Ha Hong, Seon-Pil Yun, Mong Sup Lee, N. Cho, Kwan-heum Lee, D. Hwang, Bokkyoung Park, Dong-Won Kim, Donggun Park, B. Ryu","doi":"10.1109/IEDM.2006.346838","DOIUrl":null,"url":null,"abstract":"GAA TSNWFET with 15 nm gate length and 4 nm radius nanowires is demonstrated and shows excellent short channel immunity. p-TSNWFET shows high driving current of 1.94 mA/mum while n-TSNWFET shows on-current of 1.44 mA/mum. Merits of TSNWFET and performance enhancement of p-TSNWFET are explored using 3D and quantum simulation","PeriodicalId":366359,"journal":{"name":"2006 International Electron Devices Meeting","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"181","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2006.346838","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 181
Abstract
GAA TSNWFET with 15 nm gate length and 4 nm radius nanowires is demonstrated and shows excellent short channel immunity. p-TSNWFET shows high driving current of 1.94 mA/mum while n-TSNWFET shows on-current of 1.44 mA/mum. Merits of TSNWFET and performance enhancement of p-TSNWFET are explored using 3D and quantum simulation