Y. Yokoyama, H. Ota, M. Takeda, T. Matsuura, M. Chabloz, S. Kaneko, A. Uemura
{"title":"Micro-optical switch with uni-directional I/O fibers","authors":"Y. Yokoyama, H. Ota, M. Takeda, T. Matsuura, M. Chabloz, S. Kaneko, A. Uemura","doi":"10.1109/MEMSYS.2000.838564","DOIUrl":null,"url":null,"abstract":"The authors have developed a new 2/spl times/2 micro-optical switch. The switch features a uni-directional input/output and a drive mechanism with latch functions. The newly developed structure combines two moving mirrors and a fixed V mirror to implement a 2/spl times/2 micro-optical switch with uni-directional input/output. Furthermore, the moving mirrors have been reduced in size by integrating the drive and latch functions by the use of magnetic shaft mirrors and driving coils. The micro-optical switch has been implemented as a module mounted in a ceramic package. The modular switch is 23.5/spl times/9.86/spl times/6.76 mm in size and provides a switching time of 1.3 ms for 15 V (469 mA) and an input pulse width of 1 ms. The reflectivity of the moving mirror is 98.6% (reflection loss: 0.06 dB) and the connection loss between the fixed mirror surfaces is 5.4 dB.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838564","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
The authors have developed a new 2/spl times/2 micro-optical switch. The switch features a uni-directional input/output and a drive mechanism with latch functions. The newly developed structure combines two moving mirrors and a fixed V mirror to implement a 2/spl times/2 micro-optical switch with uni-directional input/output. Furthermore, the moving mirrors have been reduced in size by integrating the drive and latch functions by the use of magnetic shaft mirrors and driving coils. The micro-optical switch has been implemented as a module mounted in a ceramic package. The modular switch is 23.5/spl times/9.86/spl times/6.76 mm in size and provides a switching time of 1.3 ms for 15 V (469 mA) and an input pulse width of 1 ms. The reflectivity of the moving mirror is 98.6% (reflection loss: 0.06 dB) and the connection loss between the fixed mirror surfaces is 5.4 dB.