Combined effect of NBTI and channel hot carrier effects in pMOSFETs

C. Guérin, V. Huard, A. Bravaix, M. Denais, J. Roux, F. Perrier, W. Baks
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引用次数: 16

Abstract

This work shows that the channel hot carrier (CHC) degradation for a p-MOSFET consists of two different regimes. At low V/sub g/, the degradation is dominated by hot electrons produced by impact ionization. The hot electrons are responsible for the creation of both interface traps and electron traps within the oxide. At high V/sub g/, a NBT-induced hot carrier effect is evidenced as well as an anomalous CHC effect. This work should help understanding the CHC degradation of pMOSFET as well as determining the worst case degradation.
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pmosfet中NBTI和通道热载子效应的联合效应
本研究表明,p-MOSFET的通道热载流子(CHC)退化由两种不同的状态组成。在低V/sub g/下,由冲击电离产生的热电子主导降解。热电子负责在氧化物中产生界面陷阱和电子陷阱。在高V/sub g/下,nbt诱导的热载子效应和异常CHC效应被证实。这项工作应该有助于理解pMOSFET的CHC降解以及确定最坏情况下的降解。
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