Micromachined tools for nano technology. Twin nano-probes and nano-scale gap control by integrated microactuators

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906536

K. Kakushima, M. Mita, D. Kobayashi, G. Hashiguchi, J. Endo, Y. Wada, H. Fujita

引用次数: 7

Abstract

This paper describes the fabrication and actuation of a novel device composed of twin nano probes. The size of the probes are 200 nm-high, 280 nm-wide and 5 /spl mu/m-long, which are formed by silicon anisotropic etching. The initial gap of about 400 nm between the probes become 84 nm when 101 mW input power was given to the thermal expansion micro actuators integrated with the probes. Precise motion down to 4 nm/mW was confirmed by simultaneous TEM observation.

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纳米技术的微加工工具。双纳米探针与集成微致动器的纳米尺度间隙控制

本文介绍了一种由双纳米探针组成的新型装置的制作和驱动。探针的尺寸为高200 nm，宽280 nm，长5 /spl mu/m，由硅各向异性蚀刻形成。当与探针集成的热膨胀微致动器输入功率为101 mW时，探针之间的初始间隙约为400 nm，变为84 nm。同时透射电镜观测证实了精确运动至4 nm/mW。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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