Optimization of the buffer thickness for high performance 1 /spl mu/m gate GaAs MESFETs on InP substrate for OEICs

M. Chertouk, A. Boudiaf, A. Chovet, R. Azoulay, A. Clei
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引用次数: 2

Abstract

GaAs/InP FETs on InP appear to be promising for the realization of optoelectronic integrated circuits (OEICs) for low and high bit-rate optical communication. However, there are two fundamental problems, the 3.9% lattice mismatch and 210/sup -6///spl deg/C difference in thermal expansion coefficients leading to the formation of a high density of dislocations and to a high level of tensile stress in the GaAs layer. For possible applications it is mandatory to investigate the effect of this mismatch through the buffer thickness on the DC and microwave performance of GaAs/InP MESFETs. An improvement in the DC and microwave performance of GaAs MESFETs on InP substrate has been observed when increasing the undoped GaAs buffer thickness. For a 3 /spl mu/m thick GaAs buffer, the 1 /spl mu/m gate MESFET has a maximum extrinsic transconductance larger than 230mS/mm, a current gain cut-off frequency of 15 GHz, a maximum frequency of oscillation of 28 GHz, a minimum noise figure of 1 dB at 4 GHz and a Hooge parameter of 2.5 10/sup -5/. Such results clearly indicate the potential of GaAs/InP MESFETs for application to OEICs.<>
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oeic用InP衬底上高性能1 /spl mu/m栅极GaAs mesfet缓冲厚度的优化
基于InP的GaAs/InP场效应管在实现低、高比特率光通信的光电集成电路(oeic)方面前景广阔。然而,有两个基本问题,即3.9%的晶格错配和210/sup -6///spl的热膨胀系数差导致了GaAs层中高密度位错的形成和高水平的拉伸应力。对于可能的应用,必须研究这种不匹配通过缓冲厚度对GaAs/InP mesfet的直流和微波性能的影响。当增加未掺杂的GaAs缓冲层厚度时,在InP衬底上的GaAs mesfet的直流和微波性能都得到了改善。对于3 /spl mu/m厚的GaAs缓冲器,1 /spl mu/m栅极MESFET的最大外部跨导大于230mS/mm,电流增益截止频率为15 GHz,最大振荡频率为28 GHz, 4 GHz时最小噪声系数为1 dB, Hooge参数为2.5 10/sup -5/。这些结果清楚地表明了GaAs/InP mesfet应用于OEICs的潜力。
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