C. Tsai, J. Hsieh, Wei-Heng Lin, L. Yen, J. Hung, T. Peng, Hsi-Ching Wang, Cheng-Yu Kuo, I.L. Huang, W. Chu, Yi-Yang Lei, C. H. Yu, L. Sheu, C. Hsieh, C. S. Liu, K. Yee, Chuei-Tang Wang, Doug C. H. Yu
{"title":"High performance passive devices for millimeter wave system integration on integrated fan-out (InFO) wafer level packaging technology","authors":"C. Tsai, J. Hsieh, Wei-Heng Lin, L. Yen, J. Hung, T. Peng, Hsi-Ching Wang, Cheng-Yu Kuo, I.L. Huang, W. Chu, Yi-Yang Lei, C. H. Yu, L. Sheu, C. Hsieh, C. S. Liu, K. Yee, Chuei-Tang Wang, Doug C. H. Yu","doi":"10.1109/IEDM.2015.7409763","DOIUrl":null,"url":null,"abstract":"High performance passive devices for millimeter wave (MMW) system, including inductor, ring resonator, power combiner, coupler, balun, transmission line, and antenna, are first realized using integrated fan-out (InFO) wafer level packaging technology. The inductors has quality factor over 40; the power combiner, coupler, and balun show lower transmission loss than on-chip passives; antenna has the efficiency of over 60%. These devices on InFO enable low noise and power MMW system for mobile communication and IoT applications.","PeriodicalId":336637,"journal":{"name":"2015 IEEE International Electron Devices Meeting (IEDM)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"11","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Electron Devices Meeting (IEDM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2015.7409763","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 11
Abstract
High performance passive devices for millimeter wave (MMW) system, including inductor, ring resonator, power combiner, coupler, balun, transmission line, and antenna, are first realized using integrated fan-out (InFO) wafer level packaging technology. The inductors has quality factor over 40; the power combiner, coupler, and balun show lower transmission loss than on-chip passives; antenna has the efficiency of over 60%. These devices on InFO enable low noise and power MMW system for mobile communication and IoT applications.