T. Allenet, M. Vockenhuber, L. van Lent-Protasova, Y. Ekinci, D. Kazazis
{"title":"On EUV resist screening with interference lithography in H1-2022","authors":"T. Allenet, M. Vockenhuber, L. van Lent-Protasova, Y. Ekinci, D. Kazazis","doi":"10.1117/12.2641837","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":374992,"journal":{"name":"International Conference on Extreme Ultraviolet Lithography 2022","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Extreme Ultraviolet Lithography 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2641837","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}