{"title":"Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection","authors":"H. Camon, F. Larnaudie","doi":"10.1109/MEMSYS.2000.838594","DOIUrl":null,"url":null,"abstract":"We propose in this paper the complete study of a bulk micromachined silicon micromirror able to tilt up to /spl plusmn/20/spl deg/ at a relatively high frequency (1 kHz). These structures actuated with particular electrodes could be also used as a digital micromirror up to 35/spl deg/. Their behaviours have been tested in term of static and frequency responses. A non-linear phenomenon has been observed at very large angle. The pressure dependence of the quality factor of the microstructure is reported. Lifetime aspect has also been tested.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"36","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838594","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 36
Abstract
We propose in this paper the complete study of a bulk micromachined silicon micromirror able to tilt up to /spl plusmn/20/spl deg/ at a relatively high frequency (1 kHz). These structures actuated with particular electrodes could be also used as a digital micromirror up to 35/spl deg/. Their behaviours have been tested in term of static and frequency responses. A non-linear phenomenon has been observed at very large angle. The pressure dependence of the quality factor of the microstructure is reported. Lifetime aspect has also been tested.
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