Discussion Groups (DG) and Special Interest Group (SIG) Summary Reports

Y. Nelson
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Abstract

The special interest group discussed the following topics : stress temperature conditions; Kelvin test structures; via chains; and proper choice of upper and lower metal connections
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讨论小组(DG)和特别兴趣小组(SIG)总结报告
特别兴趣小组讨论了以下主题:应力温度条件;开尔文测试结构;通过链;正确选择上下金属连接
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