IIRW 2005 Discussion Group Summary: NBTI

J. Campbell, C. Parthasarathy
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Abstract

The negative bias temperature instability (NBTI) is a pMOSFET reliability problem that is most often observed as a shift in threshold voltage (V) in devices subject to moderate negative gate biases at moderately elevated temperatures. Despite thefirst observations ofNBTI more than 30 years ago, it has not been become a major concern until the pastfew years. The aggravation of NBTI is due to a scaling-induced increase in effective oxidefield as well as the addition ofnitrogen in the gate dielectric. Many models have been proposed to predict the NBTIphenomenon, but a complete understanding ofthe NBTIphenomenon has proved elusive.
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IIRW 2005讨论组总结:NBTI
负偏置温度不稳定性(NBTI)是pMOSFET的可靠性问题,最常观察到的是在适度升高的温度下,受到中等负栅极偏置的器件的阈值电压(V)的移位。尽管在30多年前首次观察到nbti,但直到最近几年它才成为一个主要问题。NBTI的恶化是由于结垢引起的有效氧化场的增加以及栅极介质中氮的加入。人们提出了许多模型来预测nbti现象,但事实证明,对nbti现象的全面理解是难以捉摸的。
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