An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run
K. Doong, S. Hsieh, S.C. Lin, L. Hung, R.J. Wang, Binson Shen, J.W. Hisa, J. Guo, I. Chen, K. L. Young, C. Hsu
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引用次数: 1
Abstract
A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.
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