Incorporation/extraction of carbon and boron during semi-insulating LEC GaAs growth: roles of hydrogen and carbon monoxide in the puller atmosphere

Abstract

The effect of water in the boric oxide encapsulant has been examined based on the carbon and boron concentration results in LEC GaAs crystals and corresponding gas analysis inside the LEC puller during the growth. It has been found that hydrogen concentration increases with increasing the water content in the encapsulant, while carbon monoxide concentration remains constant. It has been concluded that hydrogen in the puller correlates with both carbon and boron contents of the crystal more significantly than carbon monoxide in the puller does.