Optimisation of a two-wire thermal sensor for flow and sound measurements

J. van Honschoten, G. Krijnen, V. Svetovoy, H. de Bree, M. Elwenspoek
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引用次数: 23

Abstract

The Microflown is an acoustic sensor measuring particle velocity instead of pressure, which is usually measured by conventional microphones. In this paper an analytical model is presented to describe the physical processes that govern the behaviour of the sensor and determine its sensitivity. The Microflown consists of two heaters that act simultaneously as sensors. Forced convection by an acoustic wave leads to a small perturbation of this temperature profile, resulting in a temperature difference between the two sensors. This temperature difference, to which the sensitivity is proportional, is calculated with perturbation theory. Consequently the frequency dependent behaviour of the sensitivity is analysed; it is found that there are two important corner frequencies, the first related to the time constant velocity of heat diffusion between the sensors, the second related to the heat capacity of the heaters. The developed model is verified by experiments. Previously a very good model has been given for the performance of the Microflown in a channel, i.e. with both heaters between fixed walls walls in the positive and negative z-direction. Here, a model is presented that describes the situation of the present used sensors: without walls under and above them. Model predictions are compared to experimental results.
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用于流量和声音测量的双线热传感器的优化
microfly是一种测量粒子速度的声学传感器,而不是通常由传统麦克风测量的压力。本文提出了一个解析模型来描述控制传感器行为和确定其灵敏度的物理过程。microfly由两个同时充当传感器的加热器组成。声波的强制对流导致温度剖面的微小扰动,从而导致两个传感器之间的温差。这种温度差与灵敏度成正比,用微扰理论计算。因此,分析了灵敏度的频率依赖行为;发现有两个重要的角频率,第一个与传感器之间热扩散的时间恒定速度有关,第二个与加热器的热容量有关。通过实验验证了所建立的模型。先前已经给出了一个非常好的模型来描述microfly在通道中的性能,即两个加热器在正负z方向的固定壁面之间。在这里,提出了一个模型,描述了目前使用的传感器的情况:下面和上面没有墙。将模型预测结果与实验结果进行比较。
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