Multi-storied photodiode CMOS image sensor for multiband imaging with 3D technology

Y. Takemoto, K. Kobayashi, M. Tsukimura, N. Takazawa, H. Kato, S. Suzuki, J. Aoki, T. Kondo, H. Saito, Y. Gomi, S. Matsuda, Y. Tadaki
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引用次数: 8

Abstract

We demonstrated multiband imaging with a multi-storied photodiode CMOS image sensor (CIS), which comprises two individually functioning layered devices that achieve optimized images in different substrates bonded by 3D technology. The sensor is able to capture a wide variety of multiband images, which is not limited to conventional visible RGB (Red Green Blue) images taken with a Bayer filter or to invisible infrared (IR) images, at the same time without any color or image degradation even with an extra IR light source. Its wide range sensitivity enables us to select the specific narrow band light wave with specific optical filter in addition to visible RGB images. This wide selection of specific wavelengths of light is useful for specific applications like medical systems to identify pathological lesions and also enables additional functions on the same sensor to make such systems smarter, smaller, and cheaper than the conventional combination of IR imaging sensors with RGB image ones. A wide selection of multiband images is also possible with our device by modifying the top semiconductor layer thickness or changing the characteristics of a color filter on the top substrate to cover a wide range of application needs.
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多层光电二极管CMOS图像传感器的多波段成像与三维技术
我们展示了多层光电二极管CMOS图像传感器(CIS)的多波段成像,该传感器由两个独立功能的分层器件组成,通过3D技术在不同的衬底上实现优化图像。该传感器能够捕获各种各样的多波段图像,不仅限于使用拜耳滤光片拍摄的常规可见RGB(红绿蓝)图像或不可见红外(IR)图像,同时即使使用额外的红外光源也不会出现任何颜色或图像退化。它的宽范围灵敏度使我们能够选择特定的窄带光波与特定的滤光片,除了可见的RGB图像。这种广泛选择特定波长的光对于医疗系统等特定应用非常有用,可以识别病理病变,并且还可以在同一传感器上实现附加功能,使此类系统比传统的红外成像传感器与RGB图像传感器的组合更智能、更小、更便宜。我们的器件还可以通过修改顶部半导体层厚度或改变顶部衬底上的彩色滤光片的特性来选择广泛的多波段图像,以满足广泛的应用需求。
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