Highly resistive body STI NDeMOS: An optimized DeMOS device to achieve moving current filaments for robust ESD protection

M. Shrivastava, J. Schneider, M. Baghini, H. Gossner, V. Rao
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引用次数: 10

Abstract

A novel DeMOS device with modified body and source region in grounded gate (gg) NMOS configuration for ESD protection is proposed. Detailed 3D simulations indicate a high failure threshold because of moving current filaments and self-protection from gate oxide breakdown, even for fast transients. A detailed physics of second basepushout and moving filaments is discussed.
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高阻体STI NDeMOS:经过优化的DeMOS器件,可实现移动电流灯丝,实现强大的ESD保护
提出了一种改进接地栅极(gg) NMOS结构主体和源区域的新型ESD保护DeMOS器件。详细的3D模拟表明,由于移动电流细丝和栅极氧化物击穿的自我保护,即使对于快速瞬态,也具有很高的故障阈值。详细讨论了二垒发射和运动细丝的物理特性。
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