A novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Abstract

A novel micro gas sensor based on both mass and conductivity measurement is presented. The sensing technique can efficiently improve the selectivity of gas-sensitive films to the detected gas. Consulting the chemical principle that an atom can be identified by its charge-mass ratio, we present an idea that the high selectivity to the detected gas can be obtained through measuring the charge-mass ratio of the gas molecule. To actualize the idea, we designed a sensor that can measure both charge and mass of the detected gas molecules only by one device at the same time. Thereby, the charge-mass ratio of the detected gas molecule can be obtained. The structure of the sensor was designed, simulated and optimized. The fabrication process and a prototype experiment are also presented.