C. Adelmann, L. Wen, A. Peter, Y. Siew, K. Croes, J. Swerts, M. Popovici, K. Sankaran, G. Pourtois, S. Van Elshocht, J. Bommels, Z. Tokei
{"title":"Alternative metals for advanced interconnects","authors":"C. Adelmann, L. Wen, A. Peter, Y. Siew, K. Croes, J. Swerts, M. Popovici, K. Sankaran, G. Pourtois, S. Van Elshocht, J. Bommels, Z. Tokei","doi":"10.1109/IITC.2014.6831863","DOIUrl":null,"url":null,"abstract":"We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.","PeriodicalId":6823,"journal":{"name":"2021 IEEE International Interconnect Technology Conference (IITC)","volume":"31 1","pages":"173-176"},"PeriodicalIF":0.0000,"publicationDate":"2014-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"63","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Interconnect Technology Conference (IITC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2014.6831863","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 63
Abstract
We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.
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