J. Gambino, R. Graf, J. Malinowski, A. Cote, W. Guthrie, K. Watson, P. Chapman, K. K. Sims, M. D. Levy, T. Aoki, G. A. Mason, M. Jaffe
{"title":"Reliability of segmented edge seal ring for RF devices","authors":"J. Gambino, R. Graf, J. Malinowski, A. Cote, W. Guthrie, K. Watson, P. Chapman, K. K. Sims, M. D. Levy, T. Aoki, G. A. Mason, M. Jaffe","doi":"10.1109/IITC.2014.6831836","DOIUrl":null,"url":null,"abstract":"RF devices are sensitive to noise coupling between devices. One source of coupling is the edge seal ring. We propose using a segmented guard ring to reduce coupling between devices. We demonstrate that the segmented guard ring is reliable for a 0.18 μm RF technology.","PeriodicalId":6823,"journal":{"name":"2021 IEEE International Interconnect Technology Conference (IITC)","volume":"73 1","pages":"367-370"},"PeriodicalIF":0.0000,"publicationDate":"2014-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Interconnect Technology Conference (IITC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC.2014.6831836","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
RF devices are sensitive to noise coupling between devices. One source of coupling is the edge seal ring. We propose using a segmented guard ring to reduce coupling between devices. We demonstrate that the segmented guard ring is reliable for a 0.18 μm RF technology.
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