Wen-Bin Yan, C. Krusen, J. Dudek, K. Lehmann, P. Rabinowitz
{"title":"Trace gas analysis by diode laser cavity ring-down spectroscopy","authors":"Wen-Bin Yan, C. Krusen, J. Dudek, K. Lehmann, P. Rabinowitz","doi":"10.1117/12.462654","DOIUrl":null,"url":null,"abstract":"The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.","PeriodicalId":64779,"journal":{"name":"半导体技术","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"半导体技术","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1117/12.462654","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.
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