{"title":"Study of airborne molecular contamination in minienvironments","authors":"Sheng‐Bai Zhu","doi":"10.1109/ASMC.2002.1001624","DOIUrl":null,"url":null,"abstract":"A comprehensive study of airborne molecular contamination (AMC) in minienvironments is presented in this paper. The impact of AMC on semiconductor manufacturing processes is reviewed. Models that describe contamination mechanisms are developed. The technologies and performance of minienvironments in contamination control are discussed based on theoretical models and experimental data.","PeriodicalId":64779,"journal":{"name":"半导体技术","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"半导体技术","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ASMC.2002.1001624","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
A comprehensive study of airborne molecular contamination (AMC) in minienvironments is presented in this paper. The impact of AMC on semiconductor manufacturing processes is reviewed. Models that describe contamination mechanisms are developed. The technologies and performance of minienvironments in contamination control are discussed based on theoretical models and experimental data.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
