{"title":"高度可复制VCSEL结构生长的原位监测与控制","authors":"Y. Houng, M. Tan, B. Liang, S. Wang, D. Mars","doi":"10.1109/ICIPRM.1994.328308","DOIUrl":null,"url":null,"abstract":"Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"In-situ monitoring and control for the growth of highly reproducible VCSEL structures\",\"authors\":\"Y. Houng, M. Tan, B. Liang, S. Wang, D. Mars\",\"doi\":\"10.1109/ICIPRM.1994.328308\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<<ETX>>\",\"PeriodicalId\":161711,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1994.328308\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1994.328308","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In-situ monitoring and control for the growth of highly reproducible VCSEL structures
Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL).<>
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
