O. Tabata, S. Konishi, P. Cusin, Y. Ito, F. Kawai, S. Hirai, S. Kawamura
{"title":"微加工可调弯曲刚度装置","authors":"O. Tabata, S. Konishi, P. Cusin, Y. Ito, F. Kawai, S. Hirai, S. Kawamura","doi":"10.1109/MEMSYS.2000.838484","DOIUrl":null,"url":null,"abstract":"This paper reports a device with tunable bending stiffness realized by microfabrication technology. Based on the newly proposed principles, two types of devices whose bending stiffness were controlled by electrostatic force and pneumatic force were fabricated. From the analysis and experiments, the feasibility of the proposed principles were confirmed and the performances of the prototyped devices were demonstrated.","PeriodicalId":251857,"journal":{"name":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","volume":"318 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":"{\"title\":\"Microfabricated tunable bending stiffness device\",\"authors\":\"O. Tabata, S. Konishi, P. Cusin, Y. Ito, F. Kawai, S. Hirai, S. Kawamura\",\"doi\":\"10.1109/MEMSYS.2000.838484\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a device with tunable bending stiffness realized by microfabrication technology. Based on the newly proposed principles, two types of devices whose bending stiffness were controlled by electrostatic force and pneumatic force were fabricated. From the analysis and experiments, the feasibility of the proposed principles were confirmed and the performances of the prototyped devices were demonstrated.\",\"PeriodicalId\":251857,\"journal\":{\"name\":\"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)\",\"volume\":\"318 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-01-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"24\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2000.838484\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2000.838484","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper reports a device with tunable bending stiffness realized by microfabrication technology. Based on the newly proposed principles, two types of devices whose bending stiffness were controlled by electrostatic force and pneumatic force were fabricated. From the analysis and experiments, the feasibility of the proposed principles were confirmed and the performances of the prototyped devices were demonstrated.
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