高性能0.15 /spl mu/m栅极长度omvppe生长InAlAs/InGaAs modfet

I. Adesida, K. Nummila, M. Tong, C. Caneau, R. Bhat
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引用次数: 0

摘要

报道了在有机-金属气相外延(OMVPE)生长的晶格匹配InAlAs/InGaAs/InP异质结构中制备的0.15 /spl mu/m t栅极调制掺杂场效应晶体管(modfet)的直流和微波性能。在508 mA/mm时,器件的外部跨导g/sub /高达1080 mS/mm,单位电流增益截止频率f/sub /为187 GHz。迄今为止,这是报道的om聚乙烯生长的modfet的最高f/sub T/。
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High-performance 0.15 /spl mu/m-gatelength OMVPE-grown InAlAs/InGaAs MODFETs
The DC and microwave performance of modulation-doped field effect transistors (MODFETs) with 0.15 /spl mu/m T-gates fabricated in a organo-metallic vapor phase epitaxy (OMVPE)-grown lattice-matched InAlAs/InGaAs/InP heterostructure are reported. Devices with extrinsic transconductance, g/sub m/, as high as 1080 mS/mm at 508 mA/mm and a unity current-gain cutoff frequency, f/sub T/, of 187 GHz are shown. To date, this is the highest f/sub T/ reported for OMVPE-grown MODFETs.<>
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