用于光波导和带状光纤无源对准的微连接器

N. Kaou, V. Armbruster, J. Jeannot, P. Mollier, H. Porte, N. Devoldère, M. de Labachelerie
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引用次数: 3

摘要

本文介绍了一种新型机械微连接器的制造方法,该微连接器用于多波导光集成电路(OIC)与带状光纤的精确光学自对准,而无需向光纤中注入光。使用光刻工艺在OIC上电沉积镍对准销,并将引脚插入硅微加工平台上的合适开口中,在该平台上使用v型凹槽精确定位光纤。报告了设计和制造问题,以及初步的实验结果,表明可以获得3 dB数量级的多余光损耗。
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Microconnectors for the passive alignment of optical waveguides and ribbon optical fibers
This paper describes the fabrication of a new mechanical microconnector, which is used for the precise optical self-alignment of multi-waveguide Optical Integrated Circuits (OIC) to ribbon optical fibers, without injecting light in the fiber. Nickel alignment pins are electrodeposited on the OIC using a photolithographic process, and the pins are inserted into suitable openings made on a silicon micromachined platform, on which optical fibers are accurately positioned using V-grooves. Design and fabrication issues are reported, as well as preliminary experimental results which show that excess optical losses on the order of 3 dB can be obtained.
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