高稳定的Ga2O3-In2O3-ZnO TFT用于有源矩阵有机发光二极管显示

C. J. Kim, Donghun Kang, I. Song, J. Park, Hyuck Lim, Sunil Kim, Eunha Lee, Ranju Chung, Jae Cheol Lee, Young-soo Park
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引用次数: 32

摘要

我们首次成功制备了具有优异电学性能和良好恒流应力稳定性的非晶ga2o3 - in2o3 - zno薄膜晶体管(TFT)。该晶体管的场效应迁移率为10 cm2/Vs,关断电流低于2 pA,漏极电流通断比高于108。阈值电压漂移小于0.2 V,在3mua和60℃下持续100小时。这种稳定的氧化物晶体管可以用作大面积OLED显示的驱动晶体管
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Highly Stable Ga2O3-In2O3-ZnO TFT for Active-Matrix Organic Light-Emitting Diode Display Application
We, for the first time, have successfully fabricated amorphous Ga 2O3-In2O3-ZnO thin film transistor (TFT) with excellent electrical properties and good stability under constant current stress. This transistor shows a field effect mobility of 10 cm2/Vs, an off current below 2 pA and a drain current on-to-off ratio of above 108. The threshold voltage shift was less than 0.2 V for 100 hours at 3 muA and 60 degC. Such stable oxide transistors can be utilized as driving transistor for large area OLED display
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