电容体声波硅盘陀螺仪

2006 International Electron Devices Meeting Pub Date : 2006-12-01 DOI:10.1109/IEDM.2006.346827

H. Johari, F. Ayazi

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引用次数: 61

摘要

介绍了一种电容体声波(BAW)硅盘陀螺仪。电容式BAW盘式陀螺仪工作在2-8MHz的频率范围内，是振动幅度小于20nm的固定器件，并且在低真空(甚至在大气中)实现非常高的质量因数(Q)，从而简化了其晶圆级封装。与低频陀螺仪相比，该器件具有更低的工作电压，从而简化了标准CMOS接口电路的设计和实现

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Capacitive Bulk Acoustic Wave Silicon Disk Gyroscopes

This paper introduces the capacitive bulk acoustic wave (BAW) silicon disk gyroscope. The capacitive BAW disk gyroscopes operate in the frequency range of 2-8MHz, are stationary devices with vibration amplitudes less than 20nm, and achieve very high quality factors (Q) in low vacuum (and even in atmosphere), which simplifies their wafer-scale packaging. The device has lower operating voltages compared to low-frequency gyroscopes, which simplifies the interface circuit design and implementation in standard CMOS

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2006 International Electron Devices Meeting

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