MOCVD制备高功率可见激光器中GaInP/AlGaInP量子阱结构的锌掺杂研究

K. Kadoiwa, M. Kato, T. Motoda, K. Mori, N. Fujii, S. Ochi, M. Yasuda, T. Sonoda, T. Murotani
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引用次数: 1

摘要

作者发现,GaInP/(Al/sub 0.7/Ga/sub 0.3/)InP量子阱结构中的非活性Zn会显著降低载流子寿命,严重影响激光器的性能和可靠性。新型n-(Al/sub 0.7/Ga/sub 0.3/)InP帽层实现了Zn在p-(Al/sub 0.7/Ga/sub 0.3/)InP层中几乎100%的活化。通过引入新的n-cap层,获得了相同的温度对可见激光器阈值电流密度的依赖关系。通过引入新型的n-(Al/sub 0.7/Ga/sub 0.3/)InP帽层,实现了窗口结构可见激光器在25/spl度/C条件下的160 mW的扭结电平和204 mW的最大光输出功率。这种可见激光器在50毫瓦、50/spl度/ c的条件下,在2600小时的稳定连续波工作下,可以达到最好的可靠性。
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Comprehensive Zn doping investigation for GaInP/AlGaInP quantum well structures for high power visible lasers grown by MOCVD
The authors found that the inactive Zn in GaInP/(Al/sub 0.7/Ga/sub 0.3/)InP quantum well structures peculiarly degraded the carrier life time which strongly affected the laser's performance and reliability. The novel cap layer of n-(Al/sub 0.7/Ga/sub 0.3/)InP realized almost 100% activation of Zn in the p-(Al/sub 0.7/Ga/sub 0.3/)InP layer. The same temperature dependence on the threshold current density of visible lasers was obtained by introducing the novel n-cap layer. The kink level of 160 mW and the maximum light output power of 204 mW at 25/spl deg/C were realized by introducing the novel cap layer of the n-(Al/sub 0.7/Ga/sub 0.3/)InP for the window structured visible laser. This visible laser could achieve the finest reliability under stable continuous wave operation over 2600 hrs under 50 mW at 50/spl deg/C.<>
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