硅上铜螺旋电感的金属化接近研究

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193165

C. Sia, K. S. Yeo, S. Chu, Z. Zeng, T. H. Lee

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引用次数: 14

摘要

本文研究了铜螺旋电感金属化接近度对硅的影响。螺旋电感的性能与面积消耗权衡，相对于其核心直径进行了定性评估首次。分析了电感器近接地金属化对电感器整体电感性能的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Metallization proximity studies for copper spiral inductors on silicon

The impacts of metallization proximity for copper spiral inductors on silicon have been investigated in this paper. Performance of the spiral inductor versus area consumption trade-off with respect to its core diameter is evaluated qualitatively for the first time. Effects of the inductor's proximate grounded metallization on its overall inductive performance are also analyzed.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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