采用新型立体光刻工艺制备的集成微电泳芯片

Y. Mizukami, D. Rajniak, M. Nishimura
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引用次数: 3

摘要

我们利用一种新的微加工工艺,在光敏传感器阵列上直接实现丙烯酸微流控通道,从而制造了一种集成的微电泳芯片。微通道的横截面为100 /spl亩/米高/spl倍/100 /spl亩/米宽,有效长度为4.5 cm。光敏器由147/spl倍/147个像素组成,每个像素测量39 /spl μ /m/spl倍/39 /spl μ /m。集成的微芯片能够以二维图像的形式实时检测整个微通道的电泳信号。为了实现表面光滑且高度透明的微通道,无需两板粘合等组装过程,提出了“双控面立体光刻(SD法)”微加工工艺。制造精度在设计值的5%以内。我们还评估了制造的微芯片的性能并确认了其功能。将样品(Blue Dextran)注入微通道后,沿整个微通道的光敏传感器获得了显著的吸光度值。吸光度与蓝葡聚糖浓度成正比。
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An integrated micro-electrophoretic chip fabricated using a new stereolithographic process
We have fabricated an integrated micro-electrophoretic chip by implementing an acrylic microfluidic channel directly on top of a photosensor array using a new microfabrication process. The cross section of the microchannel is 100 /spl mu/m high/spl times/100 /spl mu/m wide, and the effective length is 4.5 cm. The photosensor consists of 147/spl times/147 pixels, each measuring 39 /spl mu/m/spl times/39 /spl mu/m. The integrated microchip is able to detect electrophoretic signals in real time along the whole microchannel as a two-dimensional image. The microfabrication process named "stereolithography with double controlled surface (SD method)" has been newly proposed in order to realize a highly transparent microchannel with a smooth surface without assembly processes such as bonding of two plates. The accuracy of fabrication is within 5% of the design values. We have also evaluated the performance of the fabricated microchip and confirmed its functionality. After a sample (Blue Dextran) was injected into the microchannel, significant values of absorbance were obtained from the photosensor along the whole microchannel. The absorbance was proportional to the concentration of Blue Dextran.
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