用碳纳米管作阴极的微等离子体放电

2006 International Symposium on Discharges and Electrical Insulation in Vacuum Pub Date : 2006-09-01 DOI:10.1109/DEIV.2006.357434

Q. Zou, T. Ishibashi, H. Ohi, K. Nakazawa, H. Kanakusa, A. Hatta

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引用次数: 3

摘要

在扫描电子显微镜(SEM)中，以碳纳米管为阴极，在近大气压下研究了10 ~ 1000 μ m间隙的微等离子体。在相同配置下进行了场发射和气体放电实验。证实了场致电子发射能有效地向间隙内提供初级电子，从而容易引发放电。在以碳纳米管为阴极的气体放电情况下，即使放电电流超过150 mA，阴极表面也不会受到破坏

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Microplasma Discharge Using Carbon Nanotubes for Cathode

Microplasma has been studied with gaps from 10 to 1000 mum at near atmospheric pressure in a scanning electron microscope (SEM) chamber using CNTs for cathode. The field emission and gas discharge experiments were carried out at the same configuration. It was confirmed that field electron emission effectively provided primary electrons into the gap, which ignited discharge easily. In the case of gas discharge using carbon nanotubes for cathode, the cathode surface was not damaged even if the discharge current was more than 150 mA

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2006 International Symposium on Discharges and Electrical Insulation in Vacuum

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