基于“蝶形”陀螺结构的体微机械角速度传感器

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906509

N. Hedenstierna, S. Habibi, S. Nilsen, T. Kvisterøy, G. U. Jensen

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引用次数: 42

摘要

蝴蝶陀螺的工作原理首先通过在大块硅上的大的各向异性蚀刻结构得到了证明。现在，同样的原理已被用于开发更小的结构(9.6毫米/sup 2/)。新的传感器芯片在大块硅中进行icp蚀刻，并用阳极键合形成三重堆栈(玻璃/硅/玻璃)结构。与ASIC一起，传感器通常在50 Hz带宽上显示0.3 /sup o///sub s/的噪声水平和小于50 /sup o///sub s/的零速率偏移(ZRO)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Bulk micromachined angular rate sensor based on the 'butterfly'-gyro structure

The principle of the butterfly-gyro was first demonstrated with a large anisotropically etched structure in bulk silicon. Now the same principle has been used to develop a much smaller structure (9.6 mm/sup 2/). The new sensor chip is ICP-etched in bulk silicon and anodically bonded to form a triple stack (glass/Si/glass) structure. Together with an ASIC the sensor typically shows a noise level of 0.3 /sup o///sub s/ over 50 Hz bandwidth and a zero-rate offset (ZRO) less than 50 /sup o///sub s/.

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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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