评价双极晶体管高热阻的灵敏测量方法

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193175

N. Nenadovic, L. Nanver, H. Schellevis, D. D. de Mooij, V. Zieren, J. Slotboom

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引用次数: 1

摘要

一种灵敏的测量方法用于辨别器件环境中非常小的变化的热效应，并提取高热阻值。通过向列液晶成像和器件周围热扩散的有限元模拟，补充了电热行为的描述。

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Sensitive measurement method for evaluation of high thermal resistance in bipolar transistors

A sensitive measurement method is used to discern between the thermal effects of very small changes in device surroundings and to extract high thermal resistance values. The description of electro-thermal behavior is complemented by nematic liquid crystal imaging and FEM simulations of the heat spreading around the device.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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