{"title":"质子和氘核注入半绝缘Inp: Fe的红外吸收","authors":"D. Fischer, M. O. Manasreh, G. Matous, S. Pearton","doi":"10.1109/SIM.1992.752709","DOIUrl":null,"url":null,"abstract":"We have investigated hydrogen passivation in semi-insulating InP:Fe by implanting single crystal samples with 0.5 to 2.0 MeV protons and deuterons at fluences ranging from 1 x 10/sup 16/ to 5 x 10/sup 17/ cm/sup -2/. These implants give rise to a series of local vibrational modes (LVMs) in infrared absorption which are due to the stretching vibration of the bonds formed between phosphorus and the implanted atom in the vicinity of various lattice defects and impurities. Systematic variations in these LVMs are observed as a function of implant energy, fluence, and annealing temperature.","PeriodicalId":368607,"journal":{"name":"Proceedings of the 7th Conference on Semi-insulating III-V Materials,","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Infrared absorption in proton- and deuteron-implanted semi-insulating Inp: Fe\",\"authors\":\"D. Fischer, M. O. Manasreh, G. Matous, S. Pearton\",\"doi\":\"10.1109/SIM.1992.752709\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have investigated hydrogen passivation in semi-insulating InP:Fe by implanting single crystal samples with 0.5 to 2.0 MeV protons and deuterons at fluences ranging from 1 x 10/sup 16/ to 5 x 10/sup 17/ cm/sup -2/. These implants give rise to a series of local vibrational modes (LVMs) in infrared absorption which are due to the stretching vibration of the bonds formed between phosphorus and the implanted atom in the vicinity of various lattice defects and impurities. Systematic variations in these LVMs are observed as a function of implant energy, fluence, and annealing temperature.\",\"PeriodicalId\":368607,\"journal\":{\"name\":\"Proceedings of the 7th Conference on Semi-insulating III-V Materials,\",\"volume\":\"5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-04-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 7th Conference on Semi-insulating III-V Materials,\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SIM.1992.752709\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 7th Conference on Semi-insulating III-V Materials,","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SIM.1992.752709","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Infrared absorption in proton- and deuteron-implanted semi-insulating Inp: Fe
We have investigated hydrogen passivation in semi-insulating InP:Fe by implanting single crystal samples with 0.5 to 2.0 MeV protons and deuterons at fluences ranging from 1 x 10/sup 16/ to 5 x 10/sup 17/ cm/sup -2/. These implants give rise to a series of local vibrational modes (LVMs) in infrared absorption which are due to the stretching vibration of the bonds formed between phosphorus and the implanted atom in the vicinity of various lattice defects and impurities. Systematic variations in these LVMs are observed as a function of implant energy, fluence, and annealing temperature.
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