A fast, robust and simple 2-D micro-optical scanner based on contactless magnetostrictive actuation

We have fabricated and successfully operated a new 2D micro-optical scanner based on contactless magnetostrictive (MS) actuation using only one coil. A Si cantilever coated with a sputter-deposited MS film is vibrated simultaneously in both bending and torsion modes at high frequencies (10-50 kHz). It exhibits the maximum optical deflection of /spl plusmn/12 degrees at an excitation field of 4 mT; this is only 2% of the saturation field of the MS material. Moreover, the contactless magnetic actuation enabled an easy wireless vacuum encapsulation that gave Q-factors up to 1400 and improved the vibration amplitude four times more than that in air.