采用塔尔博特干涉的超紧凑编码器

J. Hane, I. Komazaki, T. Ito, Y. Kuroda, E. Yamamoto
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引用次数: 2

摘要

介绍了一种利用垂直腔面发射激光器(VCSEL)的编码器。这种高分辨率编码器是同类产品中最小的,并且在传感器头和刻度之间有很大的间隙对齐余地。这些特点是通过采用VCSEL和多功能IC并结合Talbot干涉技术同时实现的:除了光源和光敏器外,传感器头不需要任何光学元件,可以通过半导体生产技术缩小其尺寸。与我们以前的模型相比,这种编码器对灰尘等尺度的光学干扰具有更大的容忍度。
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Ultra-compact encoder using Talbot interference
A newly developed encoder using a vertical cavity surface-emitting laser (VCSEL) is presented. This high-resolution encoder is the smallest in its class and has a large allowance for the gap alignment between the sensor head and the scale. These features are realized simultaneously by adopting VCSEL and multi-functional IC and by incorporating the technique of Talbot interference: no optical elements are required for the sensor head except a light source and a photosensor, which can be reduced in size by the semiconductor production technology. In comparison to our previous model, this encoder has greater tolerance against optical disturbances to the scale such as dust.
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