X. Federspiel, A. Griffon, Marios Barlas, P. Lamontagne
{"title":"频率对高k MIM电容器可靠性的影响","authors":"X. Federspiel, A. Griffon, Marios Barlas, P. Lamontagne","doi":"10.1109/IRPS48203.2023.10117790","DOIUrl":null,"url":null,"abstract":"Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of Frequency on Reliability Of High-K MIM Capacitors\",\"authors\":\"X. Federspiel, A. Griffon, Marios Barlas, P. Lamontagne\",\"doi\":\"10.1109/IRPS48203.2023.10117790\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.\",\"PeriodicalId\":159030,\"journal\":{\"name\":\"2023 IEEE International Reliability Physics Symposium (IRPS)\",\"volume\":\"25 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE International Reliability Physics Symposium (IRPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS48203.2023.10117790\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE International Reliability Physics Symposium (IRPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS48203.2023.10117790","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of Frequency on Reliability Of High-K MIM Capacitors
Dielectric relaxation phenomena in High-K capacitors have been reported to induce transitory effects. We present here a TDDB analysis including DC and pulsed DC stress applied on HK capacitors. We evidence a significant effect of frequency on TDDB. Using a model based on dielectric polarization dynamics, we found a good agreement with TDDB evolution with frequency but also a consistent behavior in terms of voltage acceleration factor as well as activation energy.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
