M. Heimbuch, A. Holmes, M. Mack, S. Denbaars, L. Coldren, J. Bowers
{"title":"用V族液体源常压MOCVD制备高质量长波激光器","authors":"M. Heimbuch, A. Holmes, M. Mack, S. Denbaars, L. Coldren, J. Bowers","doi":"10.1109/ICIPRM.1993.380666","DOIUrl":null,"url":null,"abstract":"The authors have achieved low threshold In/sub x/Ga/sub 1-x/As/InP quantum well laser diodes, grown in a non-hydride metalorganic chemical vapor deposition system at atmospheric pressure using tertiarybutylarsine and tertiarybutylphosphine. Broad area laser diodes, emitting at 1.3 /spl mu/m, with a 1500 /spl Aring/ GaInAsP active region achieved threshold current densities of 1.25 kA/cm/sup 2/ for 400 micron cavity length. Strained and unstrained quantum wells with luminescence at 1.55 /spl mu/m have been incorporated into the active regions of laser diodes. Lattice matched In/sub 0.53/Ga/sub 0.47/As/InP single quantum well lasers exhibited extremely low threshold current densities of 220 A/cm/sup 2/ for broad area devices 3.5 mm in cavity length. Compressively strained 4 quantum wells devices displayed excellent threshold current densities of 300 A/cm/sup 2/ for 3 mm cavity lengths.<<ETX>>","PeriodicalId":186256,"journal":{"name":"1993 (5th) International Conference on Indium Phosphide and Related Materials","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1993-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High quality long wavelength lasers grown by atmospheric pressure MOCVD with liquid group V sources\",\"authors\":\"M. Heimbuch, A. Holmes, M. Mack, S. Denbaars, L. Coldren, J. Bowers\",\"doi\":\"10.1109/ICIPRM.1993.380666\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The authors have achieved low threshold In/sub x/Ga/sub 1-x/As/InP quantum well laser diodes, grown in a non-hydride metalorganic chemical vapor deposition system at atmospheric pressure using tertiarybutylarsine and tertiarybutylphosphine. Broad area laser diodes, emitting at 1.3 /spl mu/m, with a 1500 /spl Aring/ GaInAsP active region achieved threshold current densities of 1.25 kA/cm/sup 2/ for 400 micron cavity length. Strained and unstrained quantum wells with luminescence at 1.55 /spl mu/m have been incorporated into the active regions of laser diodes. Lattice matched In/sub 0.53/Ga/sub 0.47/As/InP single quantum well lasers exhibited extremely low threshold current densities of 220 A/cm/sup 2/ for broad area devices 3.5 mm in cavity length. Compressively strained 4 quantum wells devices displayed excellent threshold current densities of 300 A/cm/sup 2/ for 3 mm cavity lengths.<<ETX>>\",\"PeriodicalId\":186256,\"journal\":{\"name\":\"1993 (5th) International Conference on Indium Phosphide and Related Materials\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1993-04-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1993 (5th) International Conference on Indium Phosphide and Related Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1993.380666\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1993 (5th) International Conference on Indium Phosphide and Related Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1993.380666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
High quality long wavelength lasers grown by atmospheric pressure MOCVD with liquid group V sources
The authors have achieved low threshold In/sub x/Ga/sub 1-x/As/InP quantum well laser diodes, grown in a non-hydride metalorganic chemical vapor deposition system at atmospheric pressure using tertiarybutylarsine and tertiarybutylphosphine. Broad area laser diodes, emitting at 1.3 /spl mu/m, with a 1500 /spl Aring/ GaInAsP active region achieved threshold current densities of 1.25 kA/cm/sup 2/ for 400 micron cavity length. Strained and unstrained quantum wells with luminescence at 1.55 /spl mu/m have been incorporated into the active regions of laser diodes. Lattice matched In/sub 0.53/Ga/sub 0.47/As/InP single quantum well lasers exhibited extremely low threshold current densities of 220 A/cm/sup 2/ for broad area devices 3.5 mm in cavity length. Compressively strained 4 quantum wells devices displayed excellent threshold current densities of 300 A/cm/sup 2/ for 3 mm cavity lengths.<>
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