{"title":"仅用电化学方法制造微型零件","authors":"N. Watanabe, M. Suda, K. Furuta, T. Sakuhara","doi":"10.1109/MEMSYS.2001.906499","DOIUrl":null,"url":null,"abstract":"We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.","PeriodicalId":311365,"journal":{"name":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-01-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Fabrication of micro parts using only electrochemical process\",\"authors\":\"N. Watanabe, M. Suda, K. Furuta, T. Sakuhara\",\"doi\":\"10.1109/MEMSYS.2001.906499\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.\",\"PeriodicalId\":311365,\"journal\":{\"name\":\"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)\",\"volume\":\"23 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-01-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2001.906499\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2001.906499","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of micro parts using only electrochemical process
We have investigated two kinds of electrochemical processes that scan a processing electrode to fabricate metal micro parts. They are, electroforming on the mold made by electrochemical processing, and shape forming by electrochemical processing after electroplating. An electroformed Ni gear with diameter of 600 /spl square/m and thickness of 100 /spl square/m was fabricated by the former method, and a Ni gear with diameter of 1700 /spl square/m and thickness of 30 /spl square/m was fabricated by the latter method.
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