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引用次数: 20

摘要

基于InP的HEMT技术已经从少数实验室的研究发展成为高速微波和毫米波电路的主流。与最好的基于GaAs的fet相比,InP hemt产生更低的噪声系数、更高的增益和更高的截止频率。最近gainas通道HEMT性能的改善可能归因于:(i)在高in摩尔分数通道中获得了优越的输运特性;(ii)通过将欧姆触点自对准栅极来降低寄生电阻;(3)在保持高纵横比的同时减小栅极长度。这些努力结合在一起,在80年代末成功制造了超快的0.1 /spl μ m栅极长度的hemt,并在90年代初呈现出最先进的0.05 /spl μ m栅极长度。因此,它们现在是低噪声放大器、毫米波功率放大、宽带分布式放大器和高频振荡器电路中最有前途的候选者。综述了低噪声性能以及最近基于InP的HEMT技术向微波和毫米波功率放大的多样化。
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InP-based HEMTs: status and potential
InP based HEMT technology has evolved from research in a few labs into the mainstream of high speed microwave and millimeter wave circuits. InP HEMTs produce lower noise figures, higher gain, and higher cut-off frequencies in comparison to the best GaAs based FETs. Recent improvement in the performance of the GaInAs-channel HEMT may be attributed to: (i) obtaining superior transport properties in higher In mole-fraction channels; (ii) reducing parasitic resistance by self-aligning the ohmic contacts to the gate; and (iii) reducing the gate-length while maintaining a high aspect ratio. These efforts combined have led to a successful fabrication of ultrafast 0.1 /spl mu/m gate-length HEMTs in the late 80's to present state-of-the-art 0.05 /spl mu/m gate-lengths in the early 90's. Consequently, they are now the most promising candidate for low noise amplifiers, millimeter wave power amplification, broadband distributed amplifiers, and high frequency oscillator circuits. A review of the low noise performance is presented along with recent diversification in the InP based HEMT technology to microwave and millimeter wave power amplification.<>
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Comparisons between conventional LEC, VCZ and VGF for the growth of InP crystals Reliability of InP-based HBT's and HEMT's: experiments, failure mechanisms, and statistics Bulk InP technologies: InP against GaAs Improvement of InAlAs/InP heterointerface grown by MOVPE by using thin AlP layer Low pressure pyrolysis of alternative phosphorous precursors for chemical beam epitaxial growth of InP and related compounds
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