探头配置和校准技术对千兆赫应用晶圆电感质量因子测定的影响

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193164

R. Havens, L. Tiemeijer, L. Garnbus

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引用次数: 13

摘要

我们证明了在片上(螺旋)电感测试结构上测量的质量因子在很大程度上受到地信号和地信号-地探头配置的选择的影响。特别是当SOLT网络分析仪校准技术与地面信号探测结合使用时，质量因子值会被明显高估。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Impact of probe configuration and calibration techniques on quality factor determination of on-wafer inductors for GHz applications

We demonstrate that the quality factors measured on on-wafer (spiral) inductor test-structures are largely influenced by the choice between ground-signal and ground-signal-ground probe configuration. In particular when the SOLT network analyzer calibration technique is used in combination with ground-signal probing, the quality factor value can be overestimated significantly.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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