在模拟应用的先进CMOS技术中HCI应力后的匹配变化

J.C. Lin, S.Y. Chen, H.W. Chen, H. Lin, Z. Jhou, S. Chou, J. Ko, T. Lei, H. Haung
{"title":"在模拟应用的先进CMOS技术中HCI应力后的匹配变化","authors":"J.C. Lin, S.Y. Chen, H.W. Chen, H. Lin, Z. Jhou, S. Chou, J. Ko, T. Lei, H. Haung","doi":"10.1109/IRWS.2005.1609575","DOIUrl":null,"url":null,"abstract":"In this report, hot carrier stress impact on mismatch properties of n and p MOS transistors with different sizes produced using 0.15 /spl mu/m CMOS technology is presented for the first time. The research reveals that HCI does degrade matching of nMOSFETs' properties, but, for pMOSFETs, the changes are minor. Due to matching variation after HCI stress, for analog circuits' parameters, it is found that the after stress lines of n and pMOSFETs exhibit cross points for both /spl sigma/ (/spl square/ V/sub t,op/) and /spl sigma/ (/spl square/I/sub ds,op//I/sub ds,op/) drawings. It is suggested that the cross points can be used to indicate the minimal size for n and p pairs to have the same degree of mismatch in designing analog circuits. In addition, the interpretations for the differences in n to pMOSFETs and I/sub ds,op/ to I/sub ds,sat/ mismatches are provided with experimental verifications.","PeriodicalId":214130,"journal":{"name":"2005 IEEE International Integrated Reliability Workshop","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-10-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Matching variation after HCI stress in advanced CMOS technology for analog applications\",\"authors\":\"J.C. Lin, S.Y. Chen, H.W. Chen, H. Lin, Z. Jhou, S. Chou, J. Ko, T. Lei, H. Haung\",\"doi\":\"10.1109/IRWS.2005.1609575\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this report, hot carrier stress impact on mismatch properties of n and p MOS transistors with different sizes produced using 0.15 /spl mu/m CMOS technology is presented for the first time. The research reveals that HCI does degrade matching of nMOSFETs' properties, but, for pMOSFETs, the changes are minor. Due to matching variation after HCI stress, for analog circuits' parameters, it is found that the after stress lines of n and pMOSFETs exhibit cross points for both /spl sigma/ (/spl square/ V/sub t,op/) and /spl sigma/ (/spl square/I/sub ds,op//I/sub ds,op/) drawings. It is suggested that the cross points can be used to indicate the minimal size for n and p pairs to have the same degree of mismatch in designing analog circuits. In addition, the interpretations for the differences in n to pMOSFETs and I/sub ds,op/ to I/sub ds,sat/ mismatches are provided with experimental verifications.\",\"PeriodicalId\":214130,\"journal\":{\"name\":\"2005 IEEE International Integrated Reliability Workshop\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-10-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 IEEE International Integrated Reliability Workshop\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRWS.2005.1609575\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 IEEE International Integrated Reliability Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRWS.2005.1609575","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7

摘要

本文首次研究了热载流子应力对采用0.15 /spl mu/m CMOS工艺生产的不同尺寸n和p MOS晶体管失配特性的影响。研究表明,HCI确实降低了nmosfet的性能匹配,但对于pmosfet来说,这种变化很小。由于HCI应力后的匹配变化,对于模拟电路的参数,发现n和pmosfet的后应力线在/spl sigma/ (/spl square/ V/sub t,op/)和/spl sigma/ (/spl square/I/sub ds,op//I/sub ds,op/)图中都呈现交叉点。建议在设计模拟电路时,可以用交叉点来表示n和p对具有相同失配程度的最小尺寸。此外,对n到pmosfet和I/sub / ds、op/ to I/sub / ds、sat/ mismatch的差异进行了解释,并进行了实验验证。
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Matching variation after HCI stress in advanced CMOS technology for analog applications
In this report, hot carrier stress impact on mismatch properties of n and p MOS transistors with different sizes produced using 0.15 /spl mu/m CMOS technology is presented for the first time. The research reveals that HCI does degrade matching of nMOSFETs' properties, but, for pMOSFETs, the changes are minor. Due to matching variation after HCI stress, for analog circuits' parameters, it is found that the after stress lines of n and pMOSFETs exhibit cross points for both /spl sigma/ (/spl square/ V/sub t,op/) and /spl sigma/ (/spl square/I/sub ds,op//I/sub ds,op/) drawings. It is suggested that the cross points can be used to indicate the minimal size for n and p pairs to have the same degree of mismatch in designing analog circuits. In addition, the interpretations for the differences in n to pMOSFETs and I/sub ds,op/ to I/sub ds,sat/ mismatches are provided with experimental verifications.
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