改进电路块间隔离的策略和测试结构

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193177

D. Szmyd, L. Gambus, A. Wilbanks

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引用次数: 10

摘要

电路块之间信号的射频耦合可能很严重。我们使用高达50 GHz的s参数测量来量化同心测试结构的电隔离。深沟的使用大大提高了隔离。保护环和结隔离也是有益的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Strategies and test structures for improving isolation between circuit blocks

RF coupling of signals between circuit blocks can be severe. We quantify electrical isolation on concentric test structures using s-parameter measurements up to 50 GHz. The use of deep trenches greatly improves isolation. Guard rings and junction isolation are also beneficial.

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Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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